12KW MPCVD SYSTEM SPECIFICATIONS
| CHAMBER |
- Aluminium 6061
- Water-cooled
- Electronic lifter up to 400 mm
- Tilting up to 45 degrees
- Viewports available
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| GAS LINE |
- COMPRESSED AIR LINE (5-6 bar)
- HYDROGEN (0-1000 SCCM)
- METHANE (0-100 SCCM)
- NITROGEN (0-2 SCCM)
- OXYGEN (0-20 SCCM)
- ARGON (0-100 SCCM)
- CHAMBER VENT LINE AVAILABLE
|
| POWER HEAD/ GENERATOR |
- Make Muegge, Germany / Sairem, France / MKS, USA
- Magnetron Head
- Power Range 1200W - 12KW
- Frequency - 2450 MHz
|
| STAGE |
- Available in Copper & Stainless Steel
- Water-cooled
- Flatness (0-40 Micron)
- With Motorised Z-Axis Movement
|
| WATER COOLING |
- Water Flow Pressure 8 bar
- Flow rate - 38 LPM
|
| AUTOMATION (optional) |
- MS Windows-based software with accessories & a PC/Laptop will be provided
|
| FRAME |
- Aluminium profile frame for mounting the chamber, etc. Powder-coated aluminium top plates & side skirts.Castor wheels.
|
| PLASMA COVERAGE |
- 95mm to 100mm Moly coverage by plasma.
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