6KW MPCVD SYSTEM SPECIFICATIONS
|
CHAMBER
|
Aluminium 6061
Water cooled
Electronic lift up to 400 mm
Lifting to 45 degrees
Viewports available |
| GAS LINE |
COMPRESSED AIR LINE (0–6 bar)
HYDROGEN (0–1000 SCCM)
METHANE (0–100 SCCM)
NITROGEN (0–250 SCCM)
Oxygen (0–20 SCCM)
ARGON (0–100 SCCM)
CHAMBER VENT LINE available |
| POWER HEAD / GENERATOR |
Make Muegge, Germany / Sairem, France / MKS, USA
Magnetron Head
Power Range 600W – 6KW
Frequency - 2450 MHz |
| STAGE |
Available in Copper & Stainless Steel
Water cooled
Flatness 0–40 Micron |
| WATER COOLING |
Water Flow Pressure 3 bar
Flow rate - 34 LPM |
| AUTOMATION (optional) |
MS Windows-based software with accessories & a PC/Laptop will be provided |
| FRAME |
Aluminium profile frame for mounting the chamber, etc. Powder-coated aluminium top plates & side skirts, Castor wheels. |
| PLASMA COVERAGE |
65MM TO 90MM max coverage by plasma. |
Note:- We supply the system only with a recipe for the growth of Diamond.