| CHAMBER |
Ports: 8” OD (CF150) for substrate heater assembly. 8” OD (CF150) for target flange, 8” OD (CF150), for top view port, 6” OD CF100 for pump port, CF50 for laser port 2 nos. CF35 side view port 2 nos, CF35 for vacuum gauge, CF35 for view port for insitu optical Characterization 2 nos, CF10 for gas and air inlet 2 nos. One set of CF compatible Viton gaskets (one spare set also should be included), All view ports will have toughened glass windows with aluminium covers, Air inlet and gas inlet valves with CF10 flanges. |
| HEATER FLANGE |
Fitted with a 1.5” hot zone flat heater capable of working at 830°C (up to 10-6 torr vacuum) in vacuum as well as Oxygen, K type thermocouple. One spare heater is included. Attachment for clip mounting of substrates. Shutter assembly magnetic coupled. All the above mounted on an 8” OD (CF150) flange. Includes PID programmable temperature controller. |
| TARGET FLANGE P/N ATC |
CF150: 8” OD (CF150) flange mounted with programmable stepper motor and DC/AC motor. Programmable Controller (P/N ATCC-101) for stepper motor and DC/AC motor. The controller can index the targets as well as raster/rotate them in front of the laser beam. The number of targets is 6 nos. The controller also interfaces with the laser for multi-layer deposition (5V TTL signal). Contamination shield allowing only one target to be exposed to the laser at one time. All magnetic coupled movements, RS232 connection for Windows based operation with software. (PC to be provided by user). |
| GAS FLOW ASSEMBLY |
for controlling the ambient gas as well as venting the chamber. Includes 1 no flow meter 0-70SCCM along with fine control needle valve. |
| LENS HOLDER ATTACHMENT |
for X,Y,Z movement of lens. Comes with SiUV grade fused silica 2” dia lens and fused silica 2” dia disc. |
| FRAME |
Steel frame for mounting the chamber etc. Powder coated Aluminium covers and Sumnica topped wooden top. Adjustable up and down 1”. Castor wheels. |
| GATE VALVES |
Stainless steel gate valve with CF100 (6” OD) flanges. Bellow sealed shaft movement and gate viton O ring sealed. |
| AUTOMATION (optional) |
MS window based software with accessories & a PC/Laptop will be provided |
| TRAINING |
Training will provided by us on user site for at least two days about basic routine maintenance and repair. |
| OPERATING & MAINTENANCE MANUAL |
One set of hard and soft copy of Operating and Maintenance Manual will be provided. |
| TERMS & CONDITIONS |
* Free delivery and installation at User’s site. Installation data like machine size, machine weight, floor space required, total electrical load and other specific requirement will be provided by us once PO is placed on us.
* All non-consumable products have a warranty against manufacturing defects for 12 months from the date of installation.#Delivery 10 to 12 weeks after receipt of PO.
*Pumps, gauges and connecting hardware can be provided by user. If we provides it will reflect in the price. |
| NOTE |
LARGE AREA PLD, RHEED PLD ARE ALSO AVAILABLE |