| COMPONENT |
SPECIFICATION |
| CHAMBER |
SS 304 rectangular-shaped chamber with appropriate height to accommodate two sets of thermal evaporators and two sets of effusion cells. |
| SUBSTRATE HEATER |
• 6" diameter of sample
• 200°C Substrate temperature
• Motorized Substrate rotation (0–10 rpm)
• Motorized Actuation of shutter
• No height adjustment (If needed, we can provide it as per the requirement)
• With PID controller |
| THERMAL SOURCES |
• 2 sets of thermal sources with water-cooled arrangement.
• Motorized shutter
• 50 mm up/down movement (It will also be fixed depending on the requirement)
• Clamping arrangement to mount the boats and filament |
| EFFUSION CELL EVAPORATOR |
• 2 sets of effusion cell evaporator sources with 2 cc quartz
• Motorized shutter
• Heating temperature: 500 to 600°C |
| WATER CHILLER |
PID-programmed, 1 kW, 0.5 TR or as per requirement |
| VACUUM COMPONENTS |
1. Turbo molecular pump – HiPace 700 (Pfeiffer) with controller
2. Dry Backing Pump (10 m³/hr) – HiScroll 12 (Pfeiffer)
3. Combination Gauge (Measurement from ATM. Temp. to 10⁻⁸ Torr) – PKR 251 (Pfeiffer) with controller |
| GATE VALVE FOR THROTTLING |
Manual operation, bellows-sealed CF150 SS |
| DIGITAL THICKNESS MONITOR |
PREVAC TM13 rate monitor with single quartz crystal sensor, controller, oscillator cables, and PREVAC display for thickness monitoring |
| FRAME |
Steel frame for mounting the chamber. Powder-coated aluminium covers with Sunmica-topped wooden top. Adjustable up/down with 1" caster wheels. |
| VALVES |
1. Vent valve with N₂ gas.
2. Gas inlet valve on the chamber
3. Manual roughing and backing valves |
| AUTOMATION (Optional) |
MS Windows-based software with accessories. A PC/Laptop will be provided. |
Training will be provided by us on-site for at least two days on basic routine maintenance and repair.
One set of hard and soft copies of the Operating and Maintenance Manual will be provided.
* Free delivery and installation at the User’s site. Installation data such as machine size, machine weight, floor space required, total electrical load, and other specific requirements will be provided by us once the PO is placed with us.
* All non-consumable products have a warranty against manufacturing defects for 12 months from the date of installation. #Delivery: 10 to 12 weeks after receipt of PO.
* Pumps, gauges, and connecting hardware can be provided by the user. If we provides it will be reflected in the price.
* Quantities of thermal sources and the effusion cells will be as per user requirement.
* Also, we can provide the effusion cell and the thermal sources in separate enclosures.
* Substrate size and the temperature can be decided by the user.